Coaxial Magnetron of TC series for Coating
Deposition
It is to deposit coatings from metals, alloys and
chemical compounds onto internal tubular type parts surfaces. It is
recommended for application in the industries: machine-building,
chemistry, etc. where there is a need for protective and wear-resistant
coatings to increase service life of equipment.
Technical Characteristics:
Power, kW ...........................................
10
Voltage of discharge, V
......................400-1100
Current of discharge, A
50
Power Density, W/m2.........
.
(I,7-3,0)I03
Magnet material
.. SmCo5
Residual Induction (Βr)on
surface of target with wall thickness of 10mm, Tl
0,045-0,055
Target material
metals, alloys, chemical
compounds, graphite
Target form
.pipe, foil, wire
Deposition rate, gr in h/cm
. 0,030 (Al); 0,051
(Ti); 0,180 (Zr); 0,40 (Cu)
Target (magnetron) Sizes, mm
diameter=10-45;
length=500-6000
A magnetron particularity is a cathode-target design
in the form of water-cooled tube made of sputtered.
Material which is placed inside the part for coating its internal
surface
