Small Planar Magnetron DC- mini for Coating
Deposition
DC-mini is designed to deposit the
Coatings from metals, alloys and chemical compounds onto articles external surface. It is
recommended for application in chemistry, medicine, industrial
instrumentation, semi-conductor industry, etc. where
there is a need for corrosion- and wear-resistant and other types of
protective and decorative coatings.
Technical Characteristics:
Power, kW
........................................... 3
Voltage of discharge, V
......................500-1100
Current of discharge, А
………… up to 4,0
Current Density in sputtering Zone,
А/m2 ............(0,3-1,2) х
104
Working Pressure, Pа.................................(6-8)
х 10-1
Specific Power, кV.А/см2
........................ (0,06-1,5) х103
Target Sizes, mm:
Diameter
........................................... 30
Thickness.........................................up to
Coating Deposition Rate from 60 mm
in distance on flat surface, nм/сек:
Palladium
........................................ 30
Cu..............................................….. 33
Magnetron sizes, mm:
Diameter
............................................. 100
Height
.............................................. …130
Weight, кg............................................0,85
The magnetron basic particularity
is rather small size of targets allowing to provide: (i) a local current
of sputtered material atoms, (ii) high current
density and specific power in the sputtering zone, (iii) high efficiency
of target
Materials utilization .
