Universal Module "Kolchuga-2" with Planar Magnetron of DC, EC & LMC types to Deposit Coatings.

This module is a multi-purpose, reliable, universal design which easily fits into magnetron working chambre. It is to deposit coatings from metals, alloys (including ferromagnetic) and chemical compounds and provided with a few types of magnetrons and targets in the form of disks and plates. A particular feature of this magnetron type is the provision of intensive target cooling allowing to sputter under the Power density of plasma discharge up to: (i) (0.6-1) x 10³ W/ñm²  metals/alloys and (ii) (0.3-0.5) x10³ W/ñm² chemical compounds (carbides, nitrides, borides, silicides, etc). Such a high deposition rate secures both the rise in productivity of coating deposition process and high quality of the coatings sputtered (high density and chemical purity). The Module is recommended for application in the following industries: industrial instrumentation, machine-building, chemistry, avia-building, electronics, medicine, semi-conductor, etc where there is a need for wear- and corrosion-resistant types of coatings to increase life service of tools, various devices and machine parts.

Technical Characteristics:

Power Density of Discharge, max: W/ñm².......1 x 10³

Target materials:.......Metals and alloys, ferromagnetic materials, semi-

                                   conductors, graphite, chemical compounds

Target Form:  . . . . . . Disks, plates

Targets sizes (depend upon cathodes parts design), mm:

for ferromagnetic materials with thickness of 2-50 mm and more  -   disks with   

Ø: 30, 50, 60, 75, 98, 102

for materials with thickness up to 35 mm -  plates: width= 60-70, length up to

 1500 and more    

Module design depends upon a Cathode type; the min distance between cathode surface and a part equals to 7-10 mm that allows to considerably increase deposition rate and improve coating quality. The modules are serially produced and can be supplied (according to clients order) with all magnetron types.