Universal
Module "Kolchuga-1" with Coaxial Magnetron of TC types to Deposit
Coatings onto Internal Surfaces
This
module is a reliable universal design which easily fits into magnetron
working chambre. It is to deposit coatings
from metals, alloys and chemical compounds and provided with changeable
cathode-target in the form of water-cooled
pipe made of sputtered material or Cu assembled with sputtered
material. To have equal sputtering a magnetic system with one or few
pole cores is moving with the given speed. To deposit coatings on
to internal surface the magnetron cathode goes inside
the pipe. During the sputtering a part and cathode are not
moving; only the magnetic system is moving inside the
cathode. In the case when a part is made of current-conducting material
it is a cathode; if a part is made of dielectric the magnetron cathode
is provided with anode.
Technical Characteristics:
Power Density of Discharge, max: W/ñm2.......1,5õ103
Target materials:...................metals, alloys,
chemical compounds, graphite
Target Form . . . . . . . . . . . . . . .Tube,
foil, wire, coatings
Cathode types (the first number is Length in mm, the
second number is Diameter in mm): C(350) Ø 10-50; C(500) Ø 10-50;
C(1000) Ø 20-35; C(1500) Ø 25-35; C(3000) Ø 25-35; C(6000) Ø 45.
Module design depends upon a Cathode type; the min distance between
cathode surface and a part equals to 7-10 mm
that allows to considerably increase deposition rate and improve coating
quality.
The modules are serially produced
