Center NETSI offers:
The Installation with linear conveyor
of periodic
work; its basic version has the sizes of the working chamber:
8000x1800x500 mm and is designed for vacuum depositing thin coatings
from 0,01 up to 100 microns and above (from metals, alloys, chemical
compounds of metals with nitrogen, oxygen, carbon, boron, silicon,
sulfur and their possible intermixtures) on flat (plates, sheets) and
volumetric (complex profiles, rotary bodies) articles/parts from metal,
glass, ceramics and plastics.
The installation is equipped with: (i) the linear magnetrons up to 6
pieces (3 on each side) of the length for a target up to 1700 mm with
the power density of discharge 102-103 W/ñm2,
(ii) ionic sources up to 4 pieces (2 on each side) for ion etching
and activation, (iii) a heater of tunnel type heating up to 350 îÑ,
(iv) the systems of glow discharge and supply of reference voltage up to
1,1 KV.
The aggregate electrical power of the Installation is up to 180 KW.
