Center NETSI offers:
The
Installation with revolving conveyor
is designed for depositing protective, barrier or decorative coatings of
the thickness from 0,01 up to 10 microns; at rather small overall sizes
of working chambre the Installation has high productivity due to
effective utilization of its working space and the application of: (i)
preliminary ionic surface treatment and (ii) high-rate coatings
deposition systems.
Depending upon the tasks to be met and the technological concept the
installation is equipped with:
a)
Planar EC-1100 type
(up to 4 pieces) or coaxial TC-40 type (1 piece) sputtering systems of
extended type of up to 1100 mm in length and the power density up to 103
W/ñì2;
b)
Ionic sources (2 pieces) of extended type of up to 1100 mm in length
and the power up to 6 KW each;
c)
Heater ensuring the temperature up to 750 îÑ;
d)
Systems of glow discharge, and
e)
Module for delivery
of reference voltage up to 1,1 KV;.
Aggregate electrical power of the installation is up to 80 KW.
